23 February 2006 Synthesis of carbon nanotubes by laser-assisted chemical vapor deposition
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Proceedings Volume 6107, Laser-based Micropackaging; 61070M (2006); doi: 10.1117/12.644988
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States
Abstract
With recent advances in the aligned growth of carbon nanotubes (CNTs), there are great interests in CNT-based field-emission and electronic applications. In conventional thermal chemical vapor deposition, substrates as well as chambers need to be globally heated to a sufficiently-high reaction temperature. In this paper, we report a method for direct synthesis of CNTs on pre-defined electrodes using laser-assisted chemical vapor deposition. A CW CO2 laser (wavelength 10.6 μm, beam diameter 2 mm) was used to irradiate the pre-defined structures for CNT growth. The temperature of the substrate was measured by a pyrometer, ranging from 850-1000 °C. By varying catalysts and laser parameters, carbon nanostructures including carbon nanofiber, multi-walled and single-walled CNTs can be controllably synthesized.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Shi, Y. F. Lu, X. W. Wang, "Synthesis of carbon nanotubes by laser-assisted chemical vapor deposition", Proc. SPIE 6107, Laser-based Micropackaging, 61070M (23 February 2006); doi: 10.1117/12.644988; https://doi.org/10.1117/12.644988
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KEYWORDS
Chemical vapor deposition

Silicon

Single walled carbon nanotubes

Gas lasers

Scanning electron microscopy

Carbon

Photomicroscopy

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