23 February 2006 Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid
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Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 108 W/cm2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. X. Han, Y. X. Han, H. Ling, H. Ling, Y. F. Lu, Y. F. Lu, M. J. O'Keefe, M. J. O'Keefe, T. McKindra, T. McKindra, } "Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid", Proc. SPIE 6107, Laser-based Micropackaging, 61070P (23 February 2006); doi: 10.1117/12.644984; https://doi.org/10.1117/12.644984


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