23 February 2006 Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid
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Abstract
Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 108 W/cm2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.
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Y. X. Han, Y. X. Han, H. Ling, H. Ling, Y. F. Lu, Y. F. Lu, M. J. O'Keefe, M. J. O'Keefe, T. McKindra, T. McKindra, } "Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid", Proc. SPIE 6107, Laser-based Micropackaging, 61070P (23 February 2006); doi: 10.1117/12.644984; https://doi.org/10.1117/12.644984
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