Crossed beam irradiation for femtosecond laser micro and nanomachining with three-dimensionally isotropic spatial resolution

K. Sugioka; K. Midorikawa

doi:10.1117/12.639921

28 February 2006 Crossed beam irradiation for femtosecond laser micro and nanomachining with three-dimensionally isotropic spatial resolution

K. Sugioka, K. Midorikawa

Author Affiliations +

Proceedings Volume 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI; 61080S (2006) https://doi.org/10.1117/12.639921
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

Citation Download Citation

K. Sugioka and K. Midorikawa "Crossed beam irradiation for femtosecond laser micro and nanomachining with three-dimensionally isotropic spatial resolution", Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080S (28 February 2006); https://doi.org/10.1117/12.639921

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