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28 February 2006 Laser-based fabrication of a displacement sensor with an integrated high-accuracy position sensor
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Abstract
We present a high-accuracy force or displacement sensor made only of fused silica. This device merges integrated optics and micro-mechanics in a monolithic substrate. It differs from previous micro force sensor works in that the measured variable is acquired optically, rather than electrically. The device was manufactured using a combination of femtosecond laser pulses and chemical etching. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Our displacement sensor is composed of a mobile platform and a fixed frame. These components are linked together through sixteen high-aspect ratio double-compound flexures. This design firmly restrains the motion of the platform along a single axis. The range of motion exceeds 1-millimeter. Integrated waveguides are used to measure the displacement of the displacement with accuracy better than 50-nm.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Bado, Ali A. Said, Mark Dugan, and Yves Bellouard "Laser-based fabrication of a displacement sensor with an integrated high-accuracy position sensor", Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080U (28 February 2006); https://doi.org/10.1117/12.647881
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