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Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining
Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes
5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology
Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment