Process design and tracking support for MEMS

A. Wagener; T. Schmidt; J. Popp; K. Hahn; R. Brück; D. Ortloff

doi:10.1117/12.644486

23 January 2006 Process design and tracking support for MEMS

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, D. Ortloff

Proceedings Volume 6109, Micromachining and Microfabrication Process Technology XI; 610908 (2006) https://doi.org/10.1117/12.644486
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

A MEMS process design, development and tracking system is presented. It allows the specification of processes for specific applications and the tracking of the development procedures. The system consists of several components. Based on a comprehensive database that is able to store and manage all process related design constraint data as well as development related data linked to the fabrication process itself. A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently the software environment, called PROMENADE, will be introduced meeting the requirements of this process approach.

Citation Download Citation

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, and D. Ortloff "Process design and tracking support for MEMS", Proc. SPIE 6109, Micromachining and Microfabrication Process Technology XI, 610908 (23 January 2006); https://doi.org/10.1117/12.644486

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