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Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays
Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications
Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device
Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures
High-speed anisotropic etching of quartz using SF6/C4F8/Ar/O2 based chemistry in inductively coupled plasma reactive ion etching system
A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials
Design and fabrication of the degradation level monitoring sensor for power transformer insulating oil