Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi; Abhijat Goyal; Awnish Gupta; Srinivas Tadigadapa; Peter C. Eklund

doi:10.1117/12.657674

5 January 2006 Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi, Abhijat Goyal, Awnish Gupta, Srinivas Tadigadapa, Peter C. Eklund

Proceedings Volume 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V; 611107 (2006) https://doi.org/10.1117/12.657674
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

It has been shown that the addition of single walled carbon anotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ~25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (~1TPa) of the carbon nanotubes.

Citation Download Citation

Prasoon Joshi, Abhijat Goyal, Awnish Gupta, Srinivas Tadigadapa, and Peter C. Eklund "Improvement of the elastic modulus of micromachined structures using carbon nanotubes", Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611107 (5 January 2006); https://doi.org/10.1117/12.657674

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available