Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator

Pezhman A. Hassanpour; William L. Cleghorn; Ebrahim Esmailzadeh; James K. Mills

doi:10.1117/12.645309

5 January 2006 Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator

Pezhman A. Hassanpour, William L. Cleghorn, Ebrahim Esmailzadeh, James K. Mills

Proceedings Volume 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V; 61110W (2006) https://doi.org/10.1117/12.645309
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

In this paper, an analytical model of the mechanical behavior of a resonant beam sensor actuated by a bent beam thermal actuator is presented. The system is divided into two main subsystems: bent beam actuator and resonant beam sensor. Each subsystem is studied separately and then the model of the original system is derived based on the models of subsystems.

Citation Download Citation

Pezhman A. Hassanpour, William L. Cleghorn, Ebrahim Esmailzadeh, and James K. Mills "Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator", Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 61110W (5 January 2006); https://doi.org/10.1117/12.645309

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