23 January 2006 On-chip integrated spectrometer and microfluidic fluorescence set-up
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Abstract
Lab-on-chip systems become increasingly more relevant for biochemical analyses. Here is presented a concept for realizing a small footprint chip by combining fluorescence detection and on-chip spectrometry. The chip is to be fabricated using a single mask process based on the negative photoresist SU-8. The various subcomponents are discussed; in particular a spectrometer is presented and interfaced to a linear CCD. The integrated spectrometer combined with the CCD displays a resolving power of 175 for HeNe laser light. The fluidic system is a simple passive microfluidic network which can withstand a pressure in excess of 22 kPa without leakage as long as the sidewall is 10 μm or thicker.
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Anders M. Jorgensen, Anders M. Jorgensen, Dan A. Zauner, Dan A. Zauner, Thomas A. Anhoj, Thomas A. Anhoj, Peter M. Moselund, Peter M. Moselund, Jörg Hübner, Jörg Hübner, } "On-chip integrated spectrometer and microfluidic fluorescence set-up", Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 611209 (23 January 2006); doi: 10.1117/12.646453; https://doi.org/10.1117/12.646453
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