23 January 2006 Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror
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We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Julia W. Evans, Julia W. Evans, Katie Morzinski, Katie Morzinski, Scott Severson, Scott Severson, Lisa Poyneer, Lisa Poyneer, Bruce Macintosh, Bruce Macintosh, Daren Dillon, Daren Dillon, Layra Reza, Layra Reza, Donald Gavel, Donald Gavel, David Palmer, David Palmer, Scot Olivier, Scot Olivier, Paul Bierden, Paul Bierden, "Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130I (23 January 2006); doi: 10.1117/12.648977; https://doi.org/10.1117/12.648977

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