23 January 2006 Performance of a high-stroke segmented MEMS deformable-mirror technology
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This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 107 cycles showed no noticeable changes to the actuator positions after cycling.
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Michael A. Helmbrecht, Michael A. Helmbrecht, Thor Juneau, Thor Juneau, Matthew Hart, Matthew Hart, Nathan Doble, Nathan Doble, } "Performance of a high-stroke segmented MEMS deformable-mirror technology", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130L (23 January 2006); doi: 10.1117/12.647884; https://doi.org/10.1117/12.647884

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