23 January 2006 High-performance adaptive optics using microscale assembly
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Abstract
MicroAssembly Technologies has developed an optical MEMS process based on the batch transfer of microstructures. This "plug and play" process enables integration of ultra-flat SOI reflectors with high-aspect MEMS actuators and high-voltage CMOS driver circuits. Interferometer measurements confirm that assembled mirror devices are extremely flat.
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Michael Cohn, Michael Cohn, Kevin Chang, Kevin Chang, Alexandros Papavasiliou, Alexandros Papavasiliou, Scot Oliver, Scot Oliver, Gina Kim, Gina Kim, Gabriel Matus, Gabriel Matus, Zhixiong Xiao, Zhixiong Xiao, Steven Cheung, Steven Cheung, KaoSio Saechao, KaoSio Saechao, Ryan Roehnelt, Ryan Roehnelt, } "High-performance adaptive optics using microscale assembly", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130M (23 January 2006); doi: 10.1117/12.658058; https://doi.org/10.1117/12.658058
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