Polymer-based micro-deformable mirror for adaptive optics

Arnaud Liotard; Frederic Zamkotsian; Veronique Conedera; Norbert Fabre; Patrick Lanzoni; Henri Camon; Frederic Chazallet

doi:10.1117/12.647833

23 January 2006 Polymer-based micro-deformable mirror for adaptive optics

Arnaud Liotard, Frederic Zamkotsian, Veronique Conedera, Norbert Fabre, Patrick Lanzoni, Henri Camon, Frederic Chazallet

Author Affiliations +

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130R (2006) https://doi.org/10.1117/12.647833
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Highly performing adaptive optical (AO) systems are mandatory for next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes, for studying new fields like circumstellar disks and extra-solar planets. These systems require deformable mirrors with very challenging parameters, including number of actuators up to 250 000 and inter-actuator spacing around 500μm. MOEMS-based devices are promising for future deformable mirrors. We are currently developing a micro-deformable mirror (MDM) based on an array of electrostatic actuators with attachment posts to a continuous mirror on top. In order to reach large stroke for low driving voltage, the originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials. We have developed the first polymer piston-motion actuator: a 10μm thick mobile plate with four springs attached to the substrate, and with an air gap of 10μm exhibits a piston motion of 2μm for 30V, and measured resonance frequency of 6.5kHz is well suited for AO systems. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. We have successfully developed a dedicated 14-bit electronics in order to "linearize" the actuation. Actual location of the actuator versus expected location of the actuator is obtained with a standard deviation of 21 nm. Comparison with FEM models shows very good agreement, and design of a complete polymer-based MDM has been done.

Citation Download Citation

Arnaud Liotard, Frederic Zamkotsian, Veronique Conedera, Norbert Fabre, Patrick Lanzoni, Henri Camon, and Frederic Chazallet "Polymer-based micro-deformable mirror for adaptive optics", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130R (23 January 2006); https://doi.org/10.1117/12.647833

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available