MEMS deformable mirror embedded wavefront sensing and control system

Donald Owens; Michael Schoen; Keith Bush

doi:10.1117/12.658037

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23 January 2006 MEMS deformable mirror embedded wavefront sensing and control system

Donald Owens, Michael Schoen, Keith Bush

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Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130V (2006) https://doi.org/10.1117/12.658037
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Electrostatic Membrane Deformable Mirror (MDM) technology developed using silicon bulk micro-machining techniques offers the potential of providing low-cost, compact wavefront control systems for diverse optical system applications. Electrostatic mirror construction using bulk micro-machining allows for custom designs to satisfy wavefront control requirements for most optical systems. An electrostatic MDM consists of a thin membrane, generally with a thin metal or multi-layer high-reflectivity coating, suspended over an actuator pad array that is connected to a high-voltage driver. Voltages applied to the array elements deflect the membrane to provide an optical surface capable of correcting for measured optical aberrations in a given system. Electrostatic membrane DM designs are derived from well-known principles of membrane mechanics and electrostatics, the desired optical wavefront control requirements, and the current limitations of mirror fabrication and actuator drive electronics. MDM performance is strongly dependent on mirror diameter and air damping in meeting desired spatial and temporal frequency requirements. In this paper, we present wavefront control results from an embedded wavefront control system developed around a commercially available high-speed camera and an AgilOptics Unifi MDM driver using USB 2.0 communications and the Linux development environment. This new product, ClariFast^TM, combines our previous Clarifi^TM product offering into a faster more streamlined version dedicated strictly to Hartmann Wavefront sensing.

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Donald Owens, Michael Schoen, and Keith Bush "MEMS deformable mirror embedded wavefront sensing and control system", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130V (23 January 2006); https://doi.org/10.1117/12.658037

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