Characterization and fabrication of MOEMS-based diffractive optical switching elements

Jaap Verheggen; Ganesh Panaman; James Castracane

doi:10.1117/12.647806

23 January 2006 Characterization and fabrication of MOEMS-based diffractive optical switching elements

Jaap Verheggen, Ganesh Panaman, James Castracane

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 61140F (2006) https://doi.org/10.1117/12.647806
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

The use of miniaturized optical components for chip level communications is increasing rapidly. The possible applications include: optical switching, signal monitoring, I/O reconfiguration, and add/drop multiplexing. Micro-Opto-Electro-Mechanical Systems (MOEMS) based on customized IC fabrication processes are being used to assemble system-level architecture for integration into mainstream circuitry. MOEMS devices based on dynamic diffractive elements are currently investigated for both their signal routing capabilities and de-multiplexing properties. These characteristics are expected to increase the speed of optical data transfer. This paper focuses on the current status of the MOEMS research program for Free Space Optical inter-chip communication at the College of Nanoscale Science and Engineering, University at Albany- SUNY (CNSE) based on the MEMS Compound Grating (MCG) design. Operational characteristics of these MCG devices have been shown to operate at high voltages (>15V) compared to 5V levels prevalent in conventional integrated circuits. The specific goal of this work is to improve performance while minimizing power consumption. A design change that incorporates a higher capacitance and a lighter suspension system has been studied. A new fabrication process has been constructed utilizing Polyimide as a structural material. Fabrication steps have been optimized for best MCG device performance. Experimental results from both research tasks will be presented.

Citation Download Citation

Jaap Verheggen, Ganesh Panaman, and James Castracane "Characterization and fabrication of MOEMS-based diffractive optical switching elements", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 61140F (23 January 2006); https://doi.org/10.1117/12.647806

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