28 February 2006 Simulation and fabrication of nitride-based moth-eye light-emitting diodes
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Abstract
Light extraction efficiency of nitride-based blue-light-emitting diodes on SiC substrate is theoretically investigated using rigorously coupled wave analysis method. Rigidly periodic moth eye structure is found to show superior light extraction efficiency compared with conventional rectangular parallelepiped or pseudo-moth eye structures. High-throughput technology by laser interference lithography for the fabrication of rigidly periodic moth eye structure is established using a 244 nm laser as the light source.
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M. Nakashima, M. Nakashima, H. Kasugai, H. Kasugai, A. Deguchi, A. Deguchi, K. Balakrishnan, K. Balakrishnan, M. Iwaya, M. Iwaya, S. Kamiyama, S. Kamiyama, H. Amano, H. Amano, I. Akasaki, I. Akasaki, } "Simulation and fabrication of nitride-based moth-eye light-emitting diodes", Proc. SPIE 6115, Physics and Simulation of Optoelectronic Devices XIV, 61151Y (28 February 2006); doi: 10.1117/12.661181; https://doi.org/10.1117/12.661181
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