15 February 2006 Thermal effects in three-dimensional recording by femto/nano-second pulses
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Thermal effects are unavoidable in laser material processing and are present, to some extent, even in the case when ultra-short (sub-picosecond) pulsed irradiation is used. We discuss here the matters of high-precision energy delivery into micrometer-sized volumes for three-dimensional (3D) laser microfabrication. Precise account of the absorbed energy, pulse duration, and focal spot size allows to optimize laser processing parameters. As an example, a 3D micro-structuring of silica with better than 15 μm resolution is demonstrated by pulses of 11 ns duration and 266 nm wavelength (for a focusing by a low numerical aperture NA = 0.029 lens). The two photon absorption coefficient of silica, β ≃ 60 ± 10 cm/GW, at 266 nm has been determined. The thermal black-body type emission of non-equilibrated electrons is discussed as a possible light source for 3D modification and structuring of photo-sensitive and photo-polymerizable materials. It is also demonstrated that optical properties of ionized dielectrics can be used to determine the temperature.
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Saulius Juodkazis, Saulius Juodkazis, Mingwei Li, Mingwei Li, Dmitry Kotin, Dmitry Kotin, Igor Maksimov, Igor Maksimov, Egidijus Vanagas, Egidijus Vanagas, Hiroaki Misawa, Hiroaki Misawa, "Thermal effects in three-dimensional recording by femto/nano-second pulses", Proc. SPIE 6118, Ultrafast Phenomena in Semiconductors and Nanostructure Materials X, 611807 (15 February 2006); doi: 10.1117/12.641130; https://doi.org/10.1117/12.641130

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