1 March 2006 Surface waveguide technology for telecom and biochemical sensing
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Proceedings Volume 6125, Silicon Photonics; 61250S (2006); doi: 10.1117/12.649294
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States
Abstract
Surface waveguides for telecom applications are typically SiO2-based, low-contrast surface waveguides because these applications are dominated by the need for low optical attenuation and low polarization effects across the 1300-1600 nm band. Conventional waveguides, however, comprise films as thick as 20 micron and have minimum bend radii of tens of millimeters. These factors make conventional waveguide circuits large and expensive, and this has limited their use to relatively few applications. In the integrated optical sensing field, the waveguides typically used are (very) high-contrast waveguides. Here, especially Si3N4-core waveguides are well-known to offer much smaller bending radii (tens to hundreds of microns) due to stronger mode confinement to the core. Since they also typically comprise sub-micron core-thickness and cladding-thickness of only a few microns, high-contrast waveguides promise lower cost than low-contrast waveguides. Their use in telecom applications has been limited, however, due to strong polarization effects. Recently, LioniX, BV has developed the TriPleXTM waveguide, which promises to be a well-suited platform for both telecom and sensing applications and is based on low-cost, CMOS-compatible LPCVD processing. TriPleXtTM technology provides high-contrast waveguides with very low channel attenuation and modal birefringence that is controlled through waveguide design alone. Early experiments on typical geometries show promising waveguide characteristics (attenuation << 0.5 dB/cm, IL ≤ -2 dB, PDL << 1 dB, bend radius << 1 mm). In this paper, we present the characteristics of this TriPleXTM technology, and show devices that have demonstrated utility in telecom and/or sensor applications using medium and high-contrast waveguides. Experimental results for an MZI-based sensor platform, suitable for liquid or gaseous sensing, are also provided.
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R. G. Heideman, J. A. Walker, "Surface waveguide technology for telecom and biochemical sensing", Proc. SPIE 6125, Silicon Photonics, 61250S (1 March 2006); doi: 10.1117/12.649294; https://doi.org/10.1117/12.649294
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KEYWORDS
Waveguides

Silicon

Sensors

Signal attenuation

Cladding

Birefringence

Low pressure chemical vapor deposition

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