Paper
1 March 2006 Porous-silicon-based Bragg reflectors and Fabry-Perot interference filters for photonic applications
Dharmalingam Mangaiyarkarasi, Mark B. H. Breese, Ow Yueh Sheng, Kambiz Ansari, Chellappan Vijila, Daniel Blackwood
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Abstract
Visible light emission from the porous silicon (PSi) formed by anodic etching of Si in HF solution has raised great interest in view of possible applications of Si based devices in optoelectronics. In particular, multilayers consisting of periodic repetition of two PSi layers whose refractive indices are different can be exploited to design interference filters for controlling the emission wavelength as well as for the spectral narrowing of the wide emission band of Psi. Fabry-Perot optical microcavities with an active layer of λ\2 or λ sandwiched between two Bragg reflectors, consisting of alternating layers of high and low refractive indices are fabricated on heavily doped p-type silicon. We have investigated the optical properties of these microstructures using reflectivity and photoluminescence measurements at various temperature.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dharmalingam Mangaiyarkarasi, Mark B. H. Breese, Ow Yueh Sheng, Kambiz Ansari, Chellappan Vijila, and Daniel Blackwood "Porous-silicon-based Bragg reflectors and Fabry-Perot interference filters for photonic applications", Proc. SPIE 6125, Silicon Photonics, 61250X (1 March 2006); https://doi.org/10.1117/12.647316
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Cited by 8 scholarly publications.
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KEYWORDS
Silicon

Optical microcavities

Refractive index

Reflectivity

Etching

Reflectors

Interference filters

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