1 March 2006 Electrostatically tunable infrared filter that uses etched thin Si plates
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We fabricated infrared Fabry-Perot filters by stacking two wet-etched Si plates. When an electric voltage was applied between the plates, the spacing between the plates changed due to an electrostatic force, which caused a shift of interference peaks. The Si plates were etched in a KOH solution to 34-μm thickness in order to reduce the driving voltage. When the voltage was raised from 0 to 20 V, an interference peak shifted from 7.9- to 5.5-μm wavelength, corresponding to the decrease in the spacing from 7.9 to 5.5 μm. The peak transmittance increased to 91% by an antireflection coating on the outer surface of the filter. This coating was effective to suppress the interference inside the Si plates that created a complicated spectrum.
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Itsunari Yamada, Kazuya Kimura, Yutaka Yamagishi, Mitsunori Saito, "Electrostatically tunable infrared filter that uses etched thin Si plates", Proc. SPIE 6125, Silicon Photonics, 61250Y (1 March 2006); doi: 10.1117/12.647503; https://doi.org/10.1117/12.647503

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