Fabrication of reconfigurable photonic bandgap-MEMS waveguide device

Monica Taysing-Lara; Weimin Zhou; Gerard Dang; David M. Mackie; Peter G. Newman

doi:10.1117/12.644357

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1 March 2006 Fabrication of reconfigurable photonic bandgap-MEMS waveguide device

Monica Taysing-Lara, Weimin Zhou, Gerard Dang, David M. Mackie, Peter G. Newman

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Proceedings Volume 6128, Photonic Crystal Materials and Devices IV; 61281L (2006) https://doi.org/10.1117/12.644357
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We present the development of a fabrication technique for a semiconductor-based photonic crystal (PhC) nano-membrane device with reconfigurable active waveguides using micro-electro-mechanical systems (MEMS) technology. This device can be used as a basic building block for optoelectronic integrated circuits that can be reprogrammed for different functionalities such as switches, modulators, time delay lines, resonators, etc. The device is fabricated three-dimensionally on GaAs/Al_x1GaAs/Al_x2GaAs epitaxial layers on a GaAs substrate. The device has a top PhC membrane layer structure composed of hexagonal holes in a triangular lattice. Below that, a separate suspended bridge layer can insert a line of posts into the PhC holes to create a defect line. This MEMS feature can generate/cancel a section of the waveguide in the PhC platform, or (by partial removal) it can change the dispersion of the waveguide. Therefore, the same structure can be used as different types of devices. In this paper, we will discuss detailed fabrication processes for such a multi-layer 3D device structure, including e-beam lithography, inductively coupled plasma reactive ion etching, and multiple steps of regular photolithography and selective wet chemical etching. The unique processing sequence allows us to fabricate the multi-layer 3D device structure from one top surface without regrowth, wafer bonding, or access from the back surface. This simplifies the device processing and reduces the fabrication cost.

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Monica Taysing-Lara, Weimin Zhou, Gerard Dang, David M. Mackie, and Peter G. Newman "Fabrication of reconfigurable photonic bandgap-MEMS waveguide device", Proc. SPIE 6128, Photonic Crystal Materials and Devices IV, 61281L (1 March 2006); https://doi.org/10.1117/12.644357

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