Light induced degradation in amorphous silicon photodiodes and implication for diagnostic medical imaging application

I. Khodami; M.M. Adachi; M. Malhotra; F. Taghibakhsh; J.A. Rowlands; K.S. Karim; K.L. Kavanagh

doi:10.1117/12.653862

2 March 2006 Light induced degradation in amorphous silicon photodiodes and implication for diagnostic medical imaging application

I. Khodami, M.M. Adachi, M. Malhotra, F. Taghibakhsh, J.A. Rowlands, K.S. Karim, K.L. Kavanagh

Author Affiliations +

Proceedings Volume 6142, Medical Imaging 2006: Physics of Medical Imaging; 61422U (2006) https://doi.org/10.1117/12.653862
Event: Medical Imaging, 2006, San Diego, California, United States

Abstract

Amorphous silicon photodiodes are increasingly being used as fundamental components in digital diagnostic medical imaging system including large area chest radiography, mammography and real time fluoroscopy. The intrinsic a-Si:H material (i-a-Si:H), commonly deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD), is well known to suffer from both light and bias stress induced instabilities over time that can result in an increase in dark current and a decrease in photoconductivity. In contrast, research in Hot-Wire Chemical Vapor Deposition (HWCVD) indicates that a-Si:H films grown by HWCVD can have superior physical and electronic properties to those grown by PECVD. In this research, we report on the material properties and stability of i-a-Si:H material by comparing the photoconductivity degradation of the HWCVD and PECVD films over time. Then, we discuss the p-i-n diode fabrication process and examine the leakage and photo-current degradation in the HWCVD and PECVD photodiode structures over time via bias and time stress measurements. Also, we investigate the quantum efficiency degradation over time in a-Si:H p-i-n detectors grown by PECVD.

Citation Download Citation

I. Khodami, M.M. Adachi, M. Malhotra, F. Taghibakhsh, J.A. Rowlands, K.S. Karim, and K.L. Kavanagh "Light induced degradation in amorphous silicon photodiodes and implication for diagnostic medical imaging application", Proc. SPIE 6142, Medical Imaging 2006: Physics of Medical Imaging, 61422U (2 March 2006); https://doi.org/10.1117/12.653862

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available