Preparation of the multi-layer LiTaO<sub>3</sub> infrared-detected functional thin film

De-Yin Zhang; Da-Gui Huang; Zheng Dong

doi:10.1117/12.674225

9 June 2006 Preparation of the multi-layer LiTaO₃ infrared-detected functional thin film

De-Yin Zhang, Da-Gui Huang, Zheng Dong

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614911 (2006) https://doi.org/10.1117/12.674225
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A new sensing unit structure of the uncooled infrared detector based on the multilayer lithium tantalite (LiTaO3) pyroelectric functional thin film is introduced in this paper. An innovative sol-gel process using lithium acetate and tantalum ethoxide as starting materials to prepare the multi-layer LiTaO₃ functional thin film on two different substrates is described in detail. The glacial acetic acid addition in the tantalate ethoxide sol results in a new type molecularly modified precursor. And the LiTaO3 thin film was fabricated by spinning coater at 3000 r.p.m. To prevent the coatings from cracking, two-step "slow preannealing" was used to thermally treat the LiTaO₃ thin film samples. The gold black infrared absorbing layer of the LiTaO₃ thin film sample was evaporated about 300 nm in a clean evaporating chamber charged with nitrogen gas under a pressure of about150 Pa. The voltage response of the LiTaO₃ thin film sample was obtained by the infrared device measurement system. The specific detectivity peak of the LiTaO₃ thin film sample is near 6.1×10⁸cmHz^1/2W^-1 from 1Hz to 100Hz.

Citation Download Citation

De-Yin Zhang, Da-Gui Huang, and Zheng Dong "Preparation of the multi-layer LiTaO₃ infrared-detected functional thin film", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614911 (9 June 2006); https://doi.org/10.1117/12.674225

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