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9 June 2006 Defect study on infrared thin film of 3.8um
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Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614912 (2006) https://doi.org/10.1117/12.674226
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China
Abstract
Defects in thin film are the most important factors resulting in laser-induced damage of far-infrared laser thin film components, and always a major concern. The defect is a primary problem for infrared thin film of 3.8um in some optical systems. In this paper, single layer of ZnS YbF3 and multilayer coating is produced by thermal evaporation, and species, properties and derivation of defects in these thin films are introduced firstly, Then, the influence of material and evaporation rate on the surface defect density of laser thin film is analyzed. Finally, this paper put forward the appropriate deposition rates of thin film. The result shows that the nodule and concave hole defects are the mainly in the infrared thin film of 3.8um, and YbF3 has a great effect on the defect density in thin film. Also, the deposition rate of YbF3 has a large effect on the number and area of particles deposited on the substrate, as the evaporation rate increases, the number of particles increases markedly. It is possible that the spitting change of fused deposition material increases when the rate increases, since the centre temperature of fused deposition material increases. The defect density from 7.3X10-3 reduces to 6.8X10-4 through reducing the rate. Finally, the authors found it was appropriate when deposition rates were 4Å/s for ZnS and 2Å/s for YbF3, respectively.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yao-ping Zhang, Hong Xu, Ning Ling, and Yun-dong Zhang "Defect study on infrared thin film of 3.8um", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614912 (9 June 2006); https://doi.org/10.1117/12.674226
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