Optical properties of SiO2/Si3N4 films prepared on sapphire

Liping Feng; Zhengtang Liu; Qiang Li; QinQin Lu

doi:10.1117/12.674242

9 June 2006 Optical properties of SiO₂/Si₃N₄ films prepared on sapphire

Liping Feng, Zhengtang Liu, Qiang Li, QinQin Lu

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61491I (2006) https://doi.org/10.1117/12.674242
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Double layer films of SiO₂/Si₃N₄ were prepared on sapphire (α-Al₂O₃) by radio frequency magnetron reactive sputtering in order to increase the transmission of infrared windows of sapphire. Composition and structure of each layer of the film were analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The refractive index of deposited films was measured and effects of the coatings on optical properties of sapphire have been studied. Transmittance spectrum of uncoated sapphire and the sapphire coated on both sides with double layer films of SiO₂/Si₃N₄ have been measured using a Fourier Transform Infrared (FTIR) spectrometer. The results show that the designed SiO₂/Si₃N₄ films can increase the transmission of sapphire in mid-wave infrared greatly. The average transmittance of sapphire coated with the double layer films of SiO₂/Si₃N₄ on both sides, at wavelengths from 3 to 4.5um, can be increased to 96.3%, 10.9% higher than uncoated sapphire sample with 85.4% in average transmittance at room temperature. What's more, sapphire uncoated and coated on both sides with double layer films of SiO₂/Si₃N₄ were heated to 1000^oC and the transmissions at high temperature were measured. The results show that the transmission of coated sapphires was higher than that of uncoated ones at high temperature. The decreases in average transmission were less than 2% for the sapphire coated with the designed double layer films at 1000^oC.

Citation Download Citation

Liping Feng, Zhengtang Liu, Qiang Li, and QinQin Lu "Optical properties of SiO₂/Si₃N₄ films prepared on sapphire", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491I (9 June 2006); https://doi.org/10.1117/12.674242

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