9 June 2006 ZnS thin films fabricated by electron beam evaporation with glancing angle deposition
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Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61491L (2006) https://doi.org/10.1117/12.674246
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China
Abstract
GLAD ZnS films prepared by electron beam evaporation method with glancing angle deposition technique are reported. The influence of different oblique angle on the structure and optical properties is investigated using atomic force microscopy and transmittance spectra. The GLAD ZnS films exhibit a porous structure with isolated island and columnar formed. The surface roughness increases with the increase of oblique angle. The refractive indexes of GLAD ZnS films are lower than that of corresponding bulk materials. The maximal birefringence is obtained at oblique angle α=80o, which is ascribed to the orientated growth and anistropic structure of GLAD films. Therefore, the glancing angle deposition technique is a promising technique to obtain enhanced birefringence property.
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Sumei Wang, Sumei Wang, Guodong Xia, Guodong Xia, Jianda Shao, Jianda Shao, Zhengxiu Fan, Zhengxiu Fan, } "ZnS thin films fabricated by electron beam evaporation with glancing angle deposition", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491L (9 June 2006); doi: 10.1117/12.674246; https://doi.org/10.1117/12.674246
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