9 June 2006 Principle of a new deformable mirror actuated by liquid drops
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Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61491U (2006) https://doi.org/10.1117/12.674256
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China
Abstract
Deformable Mirror (DM) is a key element in Adaptive Optics (AO) system for correcting light wavefront aberration. A new DM actuated by liquid drops is proposed. The drop array is confined within hydrophilic areas, covering an electrode array and supporting a membrane mirror. Along with the change of the voltage between center electrode and edge electrode, the liquid drop can be deformed, pulling or pushing the membrane mirror. The DM model with water drops and aluminum membrane is analyzed with Finite Element Analyzing (FEA) software. The membrane thickness is first chosen by trial calculation. The deforming picture of the membrane driven by certain drop is obtained. Smooth deformation and a maximal altitude difference of about 33μm in pulling actuation confirmed the feasibility of the principle. Simple fabricating process, low cost, good wavefront correction ability can be expected with such a new DM.
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Hao Wang, Hao Wang, Xiangang Luo, Xiangang Luo, Hanmin Yao, Hanmin Yao, Chunlei Du, Chunlei Du, } "Principle of a new deformable mirror actuated by liquid drops", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491U (9 June 2006); doi: 10.1117/12.674256; https://doi.org/10.1117/12.674256
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