19 May 2006 500-mm aperture wavelength-tuning phase-shifting interferometer
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Abstract
A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. The optical and mechanical design and the calibration technique of the phase shifter are described in detail. Test results show that Peak-to-Valley value smaller than 63nm of interference cavity is achieved.
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Liqun Chai, Liqun Chai, Qiao Xu, Qiao Xu, Yan Deng, Yan Deng, Guiping Cheng, Guiping Cheng, Jiancheng Xu, Jiancheng Xu, Qikai Shi, Qikai Shi, } "500-mm aperture wavelength-tuning phase-shifting interferometer", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500E (19 May 2006); doi: 10.1117/12.677976; https://doi.org/10.1117/12.677976
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