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19 May 2006 500-mm aperture wavelength-tuning phase-shifting interferometer
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Abstract
A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. The optical and mechanical design and the calibration technique of the phase shifter are described in detail. Test results show that Peak-to-Valley value smaller than 63nm of interference cavity is achieved.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liqun Chai, Qiao Xu, Yan Deng, Guiping Cheng, Jiancheng Xu, and Qikai Shi "500-mm aperture wavelength-tuning phase-shifting interferometer", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500E (19 May 2006); https://doi.org/10.1117/12.677976
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