19 May 2006 Wavefront fitting of interferogram with Zernike polynomials based on SVD
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Abstract
As the resolution of the interferometer is rapidly increasing, the higher requirement is proposed to the interferometry. For avoiding losing of the useful information of the actual interferogram, an algorithm is presented based on singular value decomposition (SVD) which is more stable than other algorithms to some extent. The weight coefficients of the orthogonal polynomials can be worked out directly, which can eliminate the computational error. Then an evaluation criterion is developed to choose the optimum Zernike polynomial number. The computer simulations of this algorithm are also made. The simulation experiments have proved that it is an efficient algorithm and can reconstruct the wavefront accurately and stably.
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Liping Chang, Liping Chang, Zihua Wei, Zihua Wei, Weixing Shen, Weixing Shen, Zunqi Lin, Zunqi Lin, } "Wavefront fitting of interferogram with Zernike polynomials based on SVD", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500G (19 May 2006); doi: 10.1117/12.677984; https://doi.org/10.1117/12.677984
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