19 May 2006 Research on technology of digital knife-edge test
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Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61500M (2006); doi: 10.1117/12.678088
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China
Abstract
In order to measure the quantitative surface characteristics of large aperture optics conveniently, a digital knife-edge is formed based on the combination of traditional knife-edge, CCD image processing and computer aided calculation, which includes knife-edge positioning with image processing and introduces parameter PSD to describe frequency spectrum. Quantitative digital measurement of knife-edge is realized and surface characteristics of &nullset;150mm and &nullset;125mm spherical mirror is obtained with an accuracy up to 0.12λ(λ=532nm). In the meantime, the testing error, especially the tilt error is analyzed. Compared with testing results of interferometer, the digital knife-edge testing technology is verified available and the data useful for calculating geometric aberration and provides theoretical bases for surface modifying.
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Jun Zhang, Rong-zhu Zhang, Bang-wei Cai, Panlong Liu, "Research on technology of digital knife-edge test", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500M (19 May 2006); doi: 10.1117/12.678088; https://doi.org/10.1117/12.678088
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KEYWORDS
Interferometers

Image processing

Charge-coupled devices

Optical signal processing

Optical testing

Error analysis

Mirrors

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