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19 May 2006 Improved homodyne laser interferometer used in micro-vibration analysis
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Abstract
The use of homodyne interferometers has been limited to vibration measurements at objects with high surface reflectivity. This paper presents the modification of a homodyne Michelson laser interferometer that has been designed for vibration analysis at objects with industrial rough surfaces. High linearity, wide measurement range and low measurement uncertainty are the main features of this system. Experiments on an atomic force microscope (AFM) demonstrate the capability of the system.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Guo, J. P. Chen, D. Dontsov, X. Fu, X. T. Hu, and G. Jäger "Improved homodyne laser interferometer used in micro-vibration analysis", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502A (19 May 2006); https://doi.org/10.1117/12.676885
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