23 February 2006 Theoretical and experimental study on the precision of the stitching system
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This paper proposes a method to calculate the system's precision theoretically. The statistic theory and specially the regressive analyzing method have been employed. The theoretical analyses results show that the stitching process will not cause the additional error. The number of the sample points and the connatural error of the interferometer are the most important factors in the analyzing process. In practice the number of the sample points is decided by the size of the common area and the resolution of the interferometer. So to estimate whether the stitching operation is accurate enough the experiment is need to be done. And the experimental analyses results show the when the number of the sample points is not less than 25000 the stitching interferometer works well.
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Rongzhu Zhang, Rongzhu Zhang, } "Theoretical and experimental study on the precision of the stitching system", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502Y (23 February 2006); doi: 10.1117/12.678573; https://doi.org/10.1117/12.678573

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