A calibration method of machine vision measurement system by using a micro displacement stage

Ming Zhou; Yuekang Shan; Yu Ji

doi:10.1117/12.678607

23 February 2006 A calibration method of machine vision measurement system by using a micro displacement stage

Ming Zhou, Yuekang Shan, Yu Ji

Author Affiliations +

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61503B (2006) https://doi.org/10.1117/12.678607
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

This paper introduces a calibration method of machine vision measurement by a micro motion. This method is the combination of micro-displacement and machine vision measurement technology. It could get the system's resolution in a short time. The evaluation of the system's performance is realized automatically. It is possible to improve the reliability of measurement system by analyzing measurement results in real time.

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Ming Zhou, Yuekang Shan, and Yu Ji "A calibration method of machine vision measurement system by using a micro displacement stage", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503B (23 February 2006); https://doi.org/10.1117/12.678607

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