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23 February 2006 Application of power spectral density to specify optical super-smooth surfaces
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Abstract
The power spectral density (PSD) is an appropriate way to specify the optical super-smooth surfaces. The reasons to characterize the super-smooth surfaces using the PSD are discussed. Some super-smooth mirror substrates obtained by different process methods are measured with an atomic force microscope (AFM). The measured optical surfaces are characterized by the PSD. The result shows that the PSD is of great guidance to the selection of manufacturing methods and process improvement.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yaohong Liu, Lin Teng, Daqi Li, and Xiao Zhang "Application of power spectral density to specify optical super-smooth surfaces", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503I (23 February 2006); https://doi.org/10.1117/12.676477
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