Strain measurement of foil material in micro-machining based on computer vision

Zhenying Xu; Yun Wang; Yetai Fei

doi:10.1117/12.676510

23 February 2006 Strain measurement of foil material in micro-machining based on computer vision

Zhenying Xu, Yun Wang, Yetai Fei

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61503V (2006) https://doi.org/10.1117/12.676510
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Micro-machining plays an important role in MEMS. In the micro-machining, the influences of the surface effect and the size effect must be considered. Moreover, the deformation and damage mechanics of the materials of the micro parts are different from those of the macro ones. Thus, traditional measuring methods are unsuitable for the micro-machining. In this paper, a new apparatus based on the computer vision is developed to measure the micro tensile strain of foil material in the micro-machining. A three-CCD computer vision system is constructed. Through image processing and calculation the micro-strain of the specimen is obtained. Therefore, on-line measurement of the micro-strain in the micro-machining can be realized by this system.

Citation Download Citation

Zhenying Xu, Yun Wang, and Yetai Fei "Strain measurement of foil material in micro-machining based on computer vision", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503V (23 February 2006); https://doi.org/10.1117/12.676510

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KEYWORDS

Machine vision

Computer vision technology

Computing systems

Micromachining

Image processing

Cameras

Imaging systems

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