23 February 2006 A microoptical scanner
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Rotational prisms or reflectors are used for conventional optical scanners. Their disadvantages are large size, low scanning speed and high power consumption. In the paper a microoptical scanner based on the integration of piezoelectrical driver and microlens arrays is described. The microlens arrays consist of a convex microlens array and a cocave microlens array with 256×256 elements respectively. Each element dimension is 50×50 μm2. The scanner is driven by a piezoelectrical(PZT) crystal. A PA90 amplifier is controlled by an input signal produced by a single chip computer. The amplifier supplies a high voltage pulse signal to driving the PZT. The scanning frequency can reach 200Hz to 300Hz and the scanner's size is a few cubic centimeters.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ying Huang, Sihai Chen, Sihua Xiang, Xinjian Yi, "A microoptical scanner", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615047 (23 February 2006); doi: 10.1117/12.676532; https://doi.org/10.1117/12.676532

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