23 February 2006 A microoptical scanner
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Rotational prisms or reflectors are used for conventional optical scanners. Their disadvantages are large size, low scanning speed and high power consumption. In the paper a microoptical scanner based on the integration of piezoelectrical driver and microlens arrays is described. The microlens arrays consist of a convex microlens array and a cocave microlens array with 256×256 elements respectively. Each element dimension is 50×50 μm2. The scanner is driven by a piezoelectrical(PZT) crystal. A PA90 amplifier is controlled by an input signal produced by a single chip computer. The amplifier supplies a high voltage pulse signal to driving the PZT. The scanning frequency can reach 200Hz to 300Hz and the scanner's size is a few cubic centimeters.
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Ying Huang, Ying Huang, Sihai Chen, Sihai Chen, Sihua Xiang, Sihua Xiang, Xinjian Yi, Xinjian Yi, } "A microoptical scanner", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615047 (23 February 2006); doi: 10.1117/12.676532; https://doi.org/10.1117/12.676532

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