23 February 2006 Straightness error measurement of horizontal slideway
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In this paper, a novel method named the virtual grating phase-shifting moire fringe method for static interferogram analysis is introduced in the straightness error measurement with optical interferometry. An optical flat as the test mirror is moved along the horizontal slideway with high accuracy in the experiment implemented on ZYGO. Based on the principle of small angle test, we measure the straightness error of the subsection guide in turn from the one end. Because of the slideway's straightness error, the optical flat couldn't keep moving along the optical axis. The variation of fringes tilt and fringes number can be seen from a series of static interferograms. Then each wavefront is retrieved by processing these interferograms with the virtual grating phase-shifting moire fringe method. With the theory of plane fitting algorithm, the angle between interference wavefront and optical axes is calculated from the angle between fitted plane and optical axes, then the guide track's departure from horizontal axes is obtained. The experiment results are presented at last.
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Xuhua Wu, Xuhua Wu, Lei Chen, Lei Chen, Jiaofen Sun, Jiaofen Sun, } "Straightness error measurement of horizontal slideway", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504Q (23 February 2006); doi: 10.1117/12.676720; https://doi.org/10.1117/12.676720

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