Differential astigmatic detecting system for discontinuous surface measurement

Jianhuan Zhang; Chengrong Xiao; Yinbiao Guo

doi:10.1117/12.676862

23 February 2006 Differential astigmatic detecting system for discontinuous surface measurement

Jianhuan Zhang, Chengrong Xiao, Yinbiao Guo

Author Affiliations +

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61504Z (2006) https://doi.org/10.1117/12.676862
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

In the Production of FPC Products, the quality control, which affects the efficiency of the FPC production, is the hard nut to deal. FPC detection consists of the measurement of surface quality, step height and the space of the line. The measurement of the surface quality is incompatible with the dimension measurement. The optical system, which is based on the differential astigmatic measurement, can measure the smooth surface as well as the discontinuous surface, is presented in this paper. The system is tested with resolution of 5nm in roughness measurement, and 50nm in small dimension measurement.

Citation Download Citation

Jianhuan Zhang, Jianhuan Zhang, Chengrong Xiao, Chengrong Xiao, Yinbiao Guo, Yinbiao Guo, } "Differential astigmatic detecting system for discontinuous surface measurement", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504Z (23 February 2006); doi: 10.1117/12.676862; https://doi.org/10.1117/12.676862

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