23 February 2006 The technique of measuring absolute spectral responsivity of InGaAs detector based on cryogenic radiometer
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Abstract
The spectral responsivity is one of the important parameters of detector. With the development of infrared detect technique, infrared detector need to be better and better, so measuring the absolute spectral responsivity accurately is very important. This paper mainly introduces how to measure the absolute spectral responsivity of InGaAs detector precisely and make the measurement be based on cryogenic radiometer.We use cavity pyroelectric detector whose relative spectral responsivity should be measured ahead of time to calibrate the relative spectral responsivity of InGaAs detector in serial wavelength by means of establishing infrared spectral responsivity facility. Then we make use of silicon detector to calibrate the absolute spectral responsivity of InGaAs detector at 900nm.The silicon detector absolute spectral responsivity at 900nm is calibrated by cryogenic radiometer in association with visible spectral responsivity facility. So the absolute spectral responsivity of InGaAs detector at every wavelength can be get by calculating. At last the paper gives the measuring result and analyzes the uncertainty.
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Jihong Fan, Jihong Fan, Zhaoji Yang, Zhaoji Yang, Xiqi Hou, Xiqi Hou, Yan Qin, Yan Qin, Zhengqi Li, Zhengqi Li, "The technique of measuring absolute spectral responsivity of InGaAs detector based on cryogenic radiometer", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615050 (23 February 2006); doi: 10.1117/12.676863; https://doi.org/10.1117/12.676863
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