23 February 2006 Image measurement of micro-hole with linear CCD
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Abstract
It is difficult to measure micro-hole by means of project or light-sectioning. Irradiated by the collimated laser beam, a hole less than 0.5mm will result in an Airy spot because of diffraction, the Airy spot is measured by linear array CCD. A solution was given to define the diffusion state of diffraction image's edge, and two mathematical methods was presented to calculate inspection results in this paper. The first method is to integrate optoelectric signals from scanning sample spots, and the other is to calculate digital data with least square method by computer. Thus, the detection accuracy has been improved obviously.
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Wenjun Wu, Wenjun Wu, Bangxing Shen, Bangxing Shen, Gang Shen, Gang Shen, Shenghuai Wang, Shenghuai Wang, Feng Xie, Feng Xie, "Image measurement of micro-hole with linear CCD", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615057 (23 February 2006); doi: 10.1117/12.676934; https://doi.org/10.1117/12.676934
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