RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

M. Booth; A. Brunton; J. Cashmore; P. Elbourn; G. Elliner; M. Gower; J. Greuters; J. Hirsch; L. Kling; N. McEntee; P. Richards; V. Truffert; I. Wallhead; M. Whitfield

doi:10.1117/12.657556

22 March 2006 RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, M. Whitfield

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61510B (2006) https://doi.org/10.1117/12.657556
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Key features of the RIM-13 EUV actinic reticle imaging microscope are summarised. This is a tool which generates aerial images from blank or patterned EUV masks, emulating the illumination and projection optics of an exposure tool. Such images of mask defects, acquired by a CCD camera, are analysed using the tool software to predict their effect on resist exposure. Optical, mechanical and software performance of the tool are reported.

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M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, and M. Whitfield "RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510B (22 March 2006); https://doi.org/10.1117/12.657556

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