Design and optimization of collectors for extreme ultraviolet lithography

Fabio E. Zocchi; Enrico Buratti; Valentino Rigato

doi:10.1117/12.656417

23 March 2006 Design and optimization of collectors for extreme ultraviolet lithography

Fabio E. Zocchi, Enrico Buratti, Valentino Rigato

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61510T (2006) https://doi.org/10.1117/12.656417
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The design and optimization of nested grazing incidence collectors for extreme ultra-violet lithography is discussed taking into account the boundary conditions set by optical, mechanical, thermal, and manufacturing requirements. The trend of the collection efficiency as a function of numerical the aperture at the intermediate focus, the source-optics distance and the focal length is presented. The effect of the thickness of the mirrors on the optical performance and stability under thermal load is also discussed as a specific example involving optical, thermal and manufacturing issues. As an introduction to the discussion of the design and optimization of the collector, a theoretical maximum limit for the collection efficiency is studied as a function of collected solid angle and system etendue.

Citation Download Citation

Fabio E. Zocchi, Enrico Buratti, and Valentino Rigato "Design and optimization of collectors for extreme ultraviolet lithography", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510T (23 March 2006); https://doi.org/10.1117/12.656417

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available