23 March 2006 Defect printability study using EUV lithography
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Defect-free masks are one of the top issues for enabling EUV lithography at the 32-nm node. Since a defect-free process cannot be expected, an understanding of the defect printability is required in order to derive critical defect sizes for the mask inspection and repair. Simulations of the aerial image are compared to the experimental printing in resist on the wafer. Strong differences between the simulations and the actual printing are observed. In particular the minimum printable defect size is much larger than expected which is explained in terms of resist resolution. The defect printability in the current configuration is limited by the resist process rather than the projection optics.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Holfeld, Christian Holfeld, Karsten Bubke, Karsten Bubke, Falk Lehmann, Falk Lehmann, Bruno La Fontaine, Bruno La Fontaine, Adam R. Pawloski, Adam R. Pawloski, Siegfried Schwarzl, Siegfried Schwarzl, Frank-Michael Kamm, Frank-Michael Kamm, Thomas Graf, Thomas Graf, Andreas Erdmann, Andreas Erdmann, } "Defect printability study using EUV lithography", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61510U (23 March 2006); doi: 10.1117/12.656386; https://doi.org/10.1117/12.656386

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