A simple lithographic method for fabricating micro/nano multiscale structures

Hoon Eui Jeong; Sung Hoon Lee; Pilnam Kim; Jae Kwan Kim; Kahp Y. Suh

doi:10.1117/12.682146

24 March 2006 A simple lithographic method for fabricating micro/nano multiscale structures

Hoon Eui Jeong, Sung Hoon Lee, Pilnam Kim, Jae Kwan Kim, Kahp Y. Suh

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61512P (2006) https://doi.org/10.1117/12.682146
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

A simple method for fabricating micro/nanoscale hierarchical structures is presented using a two-step temperature-directed capillary molding technique. This lithographic method involves a sequential application of molding process in which a uniform polymer-coated surface is molded with a patterned mold by means of capillary force above the glass transition temperature of the polymer. Various microstructures and nanostructures were fabricated with minimum resolution down to ~ 50 nm with good reproducibility. Also contact angle measurements of water indicated that two wetting states coexist on a multiscale hierarchical structure where heterogeneous wetting is dominant for microstructure and homogeneous wetting for nanostructure. A simple theoretical model combining these two wetting states was presented, which was in good agreement with the experimental data. Using this approach, multiscale hierarchical structures for biomimetic functional surfaces can be fabricated with precise control over geometrical parameters and the wettability of a solid surface can be tailored in a controllable manner.

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Hoon Eui Jeong, Sung Hoon Lee, Pilnam Kim, Jae Kwan Kim, and Kahp Y. Suh "A simple lithographic method for fabricating micro/nano multiscale structures", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61512P (24 March 2006); https://doi.org/10.1117/12.682146

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KEYWORDS

Nanostructures

Polymers

Scanning electron microscopy

Nanolithography

Capillaries

Lithography

Polymethylmethacrylate

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