Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-light source

T. Inoue; P. E. Nica; K. Kaku; A. Shimoura; S. Amano; S. Miyamoto; T. Mochizuki

doi:10.1117/12.656096

24 March 2006 Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-light source

T. Inoue, P. E. Nica, K. Kaku, A. Shimoura, S. Amano, S. Miyamoto, T. Mochizuki

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61513U (2006) https://doi.org/10.1117/12.656096
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In this paper, characterizations of a cryogenic Xe capillary jet target for a laser-produced plasma extreme ultraviolet (EUV) light source are reported. The capillary jet target is a candidate of fast-supplying targets for mitigating debris generation and target consumption in a vacuum chamber without reducing the EUV conversion efficiency. Xe capillary jets (jet velocity ~ 0.4 m/s) were generated in vacuum by using annular nozzles chilled to ~ 170 K at a Xe backing pressure of ~ 0.7 MPa. Forming mechanisms of the capillary jet targets were studied by using numerical calculations. Furthermore, laser-produced plasma EUV generation was performed by irradiating a Nd:YAG laser (1064 nm, ~ 0.5 J, 10 ns, 120 μmφ, ~ 4×10¹¹ W/cm²) on a Xe capillary jet target (outer / inner diameter = 100 / 70 μmφ). The angular distribution of EUV generation was approximately uniform around the Xe capillary jet target, and the peak kinetic energy of the fast-ions was evaluated to be ~ 2 keV.

Citation Download Citation

T. Inoue, P. E. Nica, K. Kaku, A. Shimoura, S. Amano, S. Miyamoto, and T. Mochizuki "Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-light source", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61513U (24 March 2006); https://doi.org/10.1117/12.656096

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