24 March 2006 EUV generation from lithium laser plasma for lithography
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Hydrogen-like line emission from lithium has long been considered a candidate for EUV light source for lithography. We have completed the evaluation of the potential of lithium as a laser-plasma source, both theoretically and experimentally. Theoretical calculations show optimum intensity region for lithium for attaining high conversion is close to 5.0 x 1011 W/cm2, with plasma temperature near 50 eV. Experimental studies compare directly, the conversion efficiency and optimum irradiation conditions for both planar tin and lithium solid targets. Best conversion efficiency found in this study is 2% for lithium, while CE measured is better than 4% for tin target at identical experimental conditions.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Simi A. George, Simi A. George, William Silfvast, William Silfvast, Kazutoshi Takenoshita, Kazutoshi Takenoshita, Robert Bernath, Robert Bernath, Chiew-Seng Koay, Chiew-Seng Koay, Greg Shimkaveg, Greg Shimkaveg, Martin Richardson, Martin Richardson, Moza Al-Rabban, Moza Al-Rabban, Howard Scott, Howard Scott, } "EUV generation from lithium laser plasma for lithography", Proc. SPIE 6151, Emerging Lithographic Technologies X, 615143 (24 March 2006); doi: 10.1117/12.660584; https://doi.org/10.1117/12.660584


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