24 March 2006 Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses
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Abstract
We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO2) nano-particles. By using a low SnO2 concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.
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Takeshi Higashiguchi, Naoto Dojyo, Masaya Hamada, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera, "Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses", Proc. SPIE 6151, Emerging Lithographic Technologies X, 615145 (24 March 2006); doi: 10.1117/12.659162; https://doi.org/10.1117/12.659162
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